Terdapat Bibliografi.
No Inv.: 122973-122977/P/Perp/10/5c
No Inv.: 10159-10160/P/Perp/93/2c
No Inv.: 3636-3637/P/99/2c
No Inv.: 3626/P/99/1c
No Inv.: 10/PSM/P/Perp/97/1c
New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can’t keep pace with the continuous shrinking of feature size in microe…